SIOS Meßtechnik GmbH

SIOS Meßtechnik GmbH specializes in the development and manufacture of precision metro-logical instrumentation. The company was founded in 1991 by Professor Jäger and employees of the Institute of Process Measurement and Sensor Technology of the Technical University of Il-menau, Germany. Its close collaboration with the Institute on scientific and engineering matters forms the basis for its lines of innovative, top-quality, ultraprecision products.

The company is headquartered in Ilmenau's "Am Vogelherd" technology park. The firm location in the Ilmenau technology region is yet another reason for successful operations.

SIOS manufactures precision laser-interferometric measuring systems for use in nanometrology that measure lengths, angles, vibrations, or other parameters with ultrahigh precisions and resolu-tions and are also easy to use. The flexible organizational structure allows to adapt equipment to be manufactured to suit special customer requirements and conditions of use.

A main product of SIOS is the Nanopositioning and Nanomeasuring Machine NMM. This ma-chine has a positioning range of 25 x 25 x 5 mm and a resolution of 0.1 nm. Applications are in calibration of several types of standards, microbiology and semiconductor industry.

Application areas of the SIOS laserinterferometric measuring systems are in nanometrology, mi-croelectronic-device fabrication, gauging and calibration, calibrating machine axes and metro-logical instrumentation, microtechnology, industrial testing and inspection, coordinate-measurement and positioning systems, feedback control of precision drives, precision-machinery manufacturing, pharmaceutical manufacturing, research and development.

application fields

Company information

SIOS Meßtechnik GmbH
Am Vogelherd 46
98693 Ilmenau



Dr. Denis Dontsov
phone: +49 3677 6447-0
fax: +49 3677 6447-8